High temperature resistant filter cartridge for semiconductor industry
This filter cartridge is specifically designed for the semiconductor and electronics industries, providing reliable performance even under extreme conditions.
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Overview
- Thisfilter cartridge features high dirt-holding capacity, low pressure drop, and high-temperature resistance, making it an essential support component in the production processes of electronics and semiconductors.
- It achieves a filtration efficiency greater than 99.99999995% for 0.2-micron particles and 99.99999995% for 0.02-micron particles, according to DIN EN 1822 standards. The filter effectively removes nanometer-scale contaminants, with an efficiency greater than 99.999999991% for 0.003-micron particles.
- The filter media is encased in a stainless steel support layer, capable of withstanding over 161 high-temperature steam sterilizations (under laboratory conditions), and it has high forward and reverse pressure resistance.
Features
- Highly efficient retention of bacteria, viruses, and particles as small as 3 nm, ensuring product quality meets regulatory requirements.
- High temperature and mechanical resistance, effectively reducing production downtime and lowering maintenance costs.
- Suitable for sterilization using VPHP (Vaporized Hydrogen Peroxide) and ozone, reducing operational and maintenance costs.